Sputter-Ion Pump
نویسندگان
چکیده
منابع مشابه
Sputter-ion Pumps
The following paper outlines the working principles of sputter-ion pumps. The pumping mechanisms for reactive and inert gas species, as well as argon instability are explained. The operating pressure range, special designs for integrated linear pumps in accelerators and operational aspects are discussed.
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ژورنال
عنوان ژورنال: SHINKU
سال: 1970
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.13.251